A body formed by an additive process on a first side of the plate. The basic design of an electrostatic chuck is very similar to a parallel plate capacitor with one of the plates being incorporated into the chuck and the other being provided. The electrostatic chuck (esc) is used in many key semiconductor processes to hold the wafer, it uses a static electric filed to clamp the wafer under vacuum conditions. A laminate including an insulated electrode, attached to the pedestal, wherein the. 什麼是靜電吸盤 What is Electrostatic Chuck? 龍欣科技股份有限公司 (EDRAGON TECHNOLOGY electrostatic chuck . A body formed by an additive process on a first side of the plate. We’ve produced over 7,000 escs from 150mm through. A plate has gas apertures. A pedestal having a generally flat upper surface for supporting a workpiece; The basic design of an electrostatic chuck is very similar to a parallel plate capacitor with one of the plates being incorporated into the chuck and the other being provided. Another challeng...
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